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Dislocation Scattering in GaN
455
Citations
20
References
1999
Year
Dislocation DensitiesWide-bandgap SemiconductorElectrical EngineeringEdge DislocationsEngineeringPhysicsDislocation InteractionNanoelectronicsApplied PhysicsCondensed Matter PhysicsAluminum Gallium NitrideGan Power DeviceCharged-dislocation-line ScatteringCategoryiii-v Semiconductor
A theory of charged-dislocation-line scattering is developed within the framework of the Boltzmann transport equation. A fit of the theory to temperature-dependent Hall-effect data in GaN gives dislocation densities which are in excellent agreement with those measured by transmission electron microscopy. This work shows that threading edge dislocations in GaN indeed are electrically active, in agreement with recent theoretical predictions.
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