Micrometer-scale machining: tool fabrication and initial results

Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)

E. W. Becker, W. Ehrfeld, Patric Hagmann et al. · Microelectronic Engineering · 1986 · 957 citations

Materials Science, Engineering, Plastic Moulding +10

A comparative study of Pd/Sn/Au, Au/Ge/Au/Ni/Au, Au-Ge/Ni and Ni/Au-Ge/Ni ohmic contacts to n-GaAs

Md. Shafiqul Islam, P.J. McNally · Microelectronic Engineering · 1998 · 606 citations

Wide-bandgap Semiconductor, Electrical Engineering, Engineering +8

Development of the micromilling process for high-aspect-ratio microstructures

C. R. Friedrich, M. J. Vasile · Journal of Microelectromechanical Systems · 1996 · 162 citations

Materials Science, Industrial Design, Engineering +14

Scanning probe tips formed by focused ion beams

M. J. Vasile, D. A. Grigg, J. E. Griffith et al. · Review of Scientific Instruments · 1991 · 73 citations

Engineering, Microscopy, Mechanical Engineering +25

Scanning probe tip geometry optimized for metrology by focused ion beam ion milling

M. J. Vasile, D. A. Grigg, J. E. Griffith et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 68 citations

Engineering, Electron-beam Lithography, Microscopy +19