D. A. Grigg

Dimensional metrology with scanning probe microscopes

J. E. Griffith, D. A. Grigg · Journal of Applied Physics · 1993 · 175 citations

Engineering, Measurement, Microscopy +17

Tip–sample forces in scanning probe microscopy in air and vacuum

D. A. Grigg, P. E. Russell, J. E. Griffith · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1992 · 82 citations

Engineering, Microscopy, Microfabrication +13

Scanning probe tips formed by focused ion beams

M. J. Vasile, D. A. Grigg, J. E. Griffith et al. · Review of Scientific Instruments · 1991 · 73 citations

Engineering, Microscopy, Mechanical Engineering +25

Scanning probe tip geometry optimized for metrology by focused ion beam ion milling

M. J. Vasile, D. A. Grigg, J. E. Griffith et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 68 citations

Engineering, Electron-beam Lithography, Microscopy +19

Optical interferometry for measurement of the geometric dimensions of industrial parts

Peter J. de Groot, J F. Biegen, Jack Clark et al. · Applied Optics · 2002 · 58 citations

Engineering, Measurement, Industrial Engineering +22