82
Publications
3.4K
Citations
36
H-Index
1971
Active since
M. J. Vasile is an author at AT&T (United States) specializing in engineering, materials science, and applied physics.
Top concepts
EngineeringChemistryMaterial ScienceApplied PhysicsMicrofabricationSurface ScienceNatural SciencesInstrumentationPhysicsAnalytical Chemistry
Publications per year
1971–2008
82
82
Reaction of atomic fluorine with silicon: The gas phase products
M. J. Vasile, F.A. Stevie · Journal of Applied Physics · 1982 · 119 citations · Full text
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