Focused ion beam-shaped microtools for ultra-precision machining of cylindrical components

Theory of ripple topography induced by ion bombardment

R. Mark Bradley, James Harper · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1988 · 1.4K citations

Natural Sciences, Materials Science, Physics +15

Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)

E. W. Becker, W. Ehrfeld, Patric Hagmann et al. · Microelectronic Engineering · 1986 · 958 citations

Engineering, Materials Engineering, Materials Science +16

A comparative study of Pd/Sn/Au, Au/Ge/Au/Ni/Au, Au-Ge/Ni and Ni/Au-Ge/Ni ohmic contacts to n-GaAs

Md. Shafiqul Islam, P.J. McNally · Microelectronic Engineering · 1998 · 606 citations

Engineering, Electrical Engineering, Materials Science +14

Micro-Cutting of Steel to Meet New Requirements in Miniaturization

Hartmut Weule, Volker Hüntrup, H. Tritschler · CIRP Annals · 2001 · 349 citations

Engineering, Manufacturing Engineering, Materials Science +12

High-resolution focused ion beams

Jon Orloff · Review of Scientific Instruments · 1993 · 344 citations

Engineering, Materials Engineering, Materials Science +10