Micromilling of metal alloys with focused ion beam–fabricated tools

Wire Electro-Discharge Grinding for Micro-Machining

T. Masuzawa, Masahisa Fujino, K. Kobayashi et al. · CIRP Annals · 1985 · 577 citations

Engineering, Manufacturing Engineering, Materials Engineering +11

High-resolution focused ion beams

Jon Orloff · Review of Scientific Instruments · 1993 · 344 citations

Engineering, Materials Engineering, Materials Science +10

Microstructure grooves with a width of less than 50 μm cut with ground hard metal micro end mills

Th. Schaller, Lothar Bohn, Jeffrey Mayer et al. · Precision Engineering · 1999 · 217 citations

Engineering, Manufacturing Engineering, Materials Science +10

Development of the micromilling process for high-aspect-ratio microstructures

C. R. Friedrich, M. J. Vasile · Journal of Microelectromechanical Systems · 1996 · 163 citations

Engineering, Manufacturing Engineering, Materials Engineering +15

Micro electro-discharge machining and its applications

Takeshi Masaki, K Kawata, T. Masuzawa · 2002 · 128 citations

Engineering, Manufacturing Engineering, Mechanical Engineering +12