Microstructure grooves with a width of less than 50 μm cut with ground hard metal micro end mills

Development of the micromilling process for high-aspect-ratio microstructures

C. R. Friedrich, M. J. Vasile · Journal of Microelectromechanical Systems · 1996 · 162 citations

Materials Science, Industrial Design, Engineering +14

Particle size distribution analysis by scattered light measurements using an optically defined measuring volume

Heinz Umhauer · Journal of Aerosol Science · 1983 · 70 citations

Microscopy, Defined Measuring Volume, Measurement +5

Direct fabrication of deep x-ray lithography masks by micromechanical milling

Craig R. Friedrich, P. Coane, Jost Goettert et al. · Precision Engineering · 1998 · 36 citations

Materials Science, Engineering, Electron-beam Lithography +9

High aspect ratio multi-level mold inserts fabricated by mechanical micro machining and deep etch X-ray lithography

Jens Fahrenberg, T. Schaller, W. Bacher et al. · Microsystem Technologies · 1996 · 21 citations

Materials Science, High Aspect, Engineering +11

Microsystems in medicine.

Ulrike Wallrabe, Patrick Ruther, T. Schaller et al. · PubMed · 1998 · 14 citations

Engineering, Mechanical Engineering, Analytical Microsystems +19