Direct fabrication of deep x-ray lithography masks by micromechanical milling

Development of the micromilling process for high-aspect-ratio microstructures

C. R. Friedrich, M. J. Vasile · Journal of Microelectromechanical Systems · 1996 · 162 citations

Materials Science, Industrial Design, Engineering +14

Micrometer-scale machining: tool fabrication and initial results

M. J. Vasile, Craig R. Friedrich, Bharath Kikkeri et al. · Precision Engineering · 1996 · 72 citations

Engineering, Microfabrication, Material Machining +5

The micromilling process for high aspect ratio microstructures

C. R. Friedrich, M. J. Vasile · Microsystem Technologies · 1995 · 32 citations

Materials Science, Engineering, Microfabrication +6

The micromilling process for high aspect ratio microstructures

C. R. Friedrich, M. J. Vasile · Microsystem Technologies · 1996 · 30 citations

Materials Science, Engineering, Microfabrication +6

Deep etch X-ray lithography using silicon-gold masks fabricated by deep etch UV lithography and electroforming

S. Ballandras, W. Daniau, Skandar Basrour et al. · Journal of Micromechanics and Microengineering · 1995 · 18 citations

Engineering, Electron-beam Lithography, Gold Absorbers +19