Microactuators with moving magnets for linear, torsional or multiaxial motion

Silicon pressure sensor integrates resonant strain gauge on diaphragm

Kyoichi Ikeda, Hideki Kuwayama, Takashi Kobayashi et al. · Sensors and Actuators A Physical · 1990 · 134 citations

Engineering, Materials Science, Mechanical Engineering +12

Microfabricated actuator with moving permanent magnet

Bernhard Wagner, W. Benecke · 1991 · 106 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

The design and fabrication of a magnetically actuated micromachined flow valve

R. L. Smith, R.W. Bower, Scott D. Collins · Sensors and Actuators A Physical · 1990 · 34 citations

Engineering, Mechanical Engineering, Actuators +11

Magnetic micro-actuator

Keiichi Yanagisawa, A. Tago, T. Ohkubo et al. · 2002 · 32 citations · Full text

Engineering, Electrical Engineering, Mechanical Engineering +17

Electromagnetic microactuators with multiple degrees of freedom

B. Wagner, Martin Kreutzer, W. Benecke · TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers · 1991 · 23 citations

Engineering, Electrical Engineering, Mechatronics Engineering +17