Microfabricated actuator with moving permanent magnet

Microrobots and micromechanical systems

William S. Trimmer · Sensors and Actuators · 1989 · 410 citations

Engineering, Mechanical Engineering, Robotics Engineering +12

Silicon pressure sensor integrates resonant strain gauge on diaphragm

Kyoichi Ikeda, Hideki Kuwayama, Takashi Kobayashi et al. · Sensors and Actuators A Physical · 1990 · 134 citations

Engineering, Materials Science, Mechanical Engineering +12

The design and fabrication of a magnetically actuated micromachined flow valve

R. L. Smith, R.W. Bower, Scott D. Collins · Sensors and Actuators A Physical · 1990 · 34 citations

Engineering, Mechanical Engineering, Actuators +11

Magnetically driven micropositioners

D. P. E. Smith, Scott Elrod · Review of Scientific Instruments · 1985 · 31 citations

Engineering, Electrical Engineering, Mechanical Engineering +16

Resonant-structure micromotors

Albert P. Pisano · 2003 · 26 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +17