Review of Scientific Instruments · 1985 · 31 citations · 1 references
EngineeringElectrical EngineeringMechanical EngineeringElectromagneticsElectromagnetismMicroelectromechanical SystemsMagnetic ActuationMagnetic ActuatorsMems ActuatorsMems DesignMicrofabrication ProcessesMicromachiningDynamic RangeLarge-displacement ActuationMagnetic MicroactuatorsMagnetic MicromotorsMicropositionersMicropositioning SystemsNanopositioning Systems
Several designs are presented for micropositioners which use permanent magnets and current carrying coils to attain controlled displacements down to 5 nm while possessing a dynamic range of several centimeters. Angular displacements of less than 10−3 rad are also possible.
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Low-temperature vacuum tunneling microscopy
Scott Elrod, Alex de Lozanne, C. F. Quate · Applied Physics Letters · 1984 · 89 citations