Micropositioners

A Micropositioner is a precision motion device within the category of microelectromechanical systems actuators that enables controlled displacement at the microscale through integrated actuation mechanisms driven by electrical or mechanical inputs.

121

Publications

5.1K

Citations

324

Authors

125

Institutions

Publications per year

2017–2026

Parents

Mems Actuators

Publications

121

High bandwidth nano-positioner: A robust control approach

Srinivasa M. Salapaka, Abu Sebastian, J. P. Cleveland et al. · Review of Scientific Instruments · 2002 · 416 citations

Engineering, Electrical Engineering, Mechatronics Engineering +16

Micromachining for optical and optoelectronic systems

Ming C. Wu · Proceedings of the IEEE · 1997 · 264 citations

Engineering, Mechanical Engineering, Microfabrication +16

Technology and Developments for the Random Positioning Machine, RPM

A. G. Borst, Jack J. W. A. van Loon · Microgravity Science and Technology · 2008 · 239 citations · Full text

Engineering, Mechanical Engineering, Mechatronics Engineering +9

An ultra-precision XY/spl theta//sub Z/ piezo-micropositioner. I. Design and analysis

Shuo Chang, Chung Kai Tseng, Hon Chan Chien · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 1999 · 124 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +15

A micromachined 2D positioner with electrothermal actuation and sub-nanometer capacitive sensing

L.L. Chu, Yogesh B. Gianchandani · Journal of Micromechanics and Microengineering · 2003 · 114 citations · Full text

Engineering, Electrical Engineering, Mechanical Engineering +17

1–5 of 121

Authors

324

QX
Qingsong Xu
University of Macau, Macao SAR China
10 publications · 491 citations
10
h-index
BS
Bijan Shirinzadeh
Monash University, Australia
6 publications · 205 citations
6
h-index
MG
Mohammadali Ghafarian
Monash University, Australia
6 publications · 205 citations
6
h-index
AA
Ammar Al-Jodah
Monash University, Australia
6 publications · 205 citations
6
h-index
TK
Tilok Kumar Das
Monash University, Australia
5 publications · 195 citations
5
h-index

1–5 of 324

Institutions

125

1–8 of 125

Venues

Review of Scientific Instruments
20 publications · 1.1K citations
14
h-index
Sensors and Actuators A Physical
6 publications · 252 citations
6
h-index
Precision Engineering
6 publications · 373 citations
6
h-index
IEEE/ASME Transactions on Mechatronics
5 publications · 194 citations
5
h-index
Mechanical Systems and Signal Processing
MSSP · 5 publications · 233 citations
5
h-index

1–5