The design and fabrication of a magnetically actuated micromachined flow valve

Microrobots and micromechanical systems

William S. Trimmer · Sensors and Actuators · 1989 · 410 citations

Engineering, Mechanical Engineering, Robotics Engineering +12

Design considerations for micromachined electric actuators

Stephen F. Bart, T.A. Lober, Roger T. Howe et al. · Sensors and Actuators · 1988 · 136 citations

Engineering, Electrical Engineering, Mechanical Engineering +13

A thermo-pneumatic actuation principle for a microminiature pump and other micromechanical devices

F.C.M. van de Pol, D.G.J. Wonnink, Michael Curt Elwenspoek et al. · Sensors and Actuators · 1989 · 65 citations · Full text

Engineering, Mechanical Engineering, Mechatronics Engineering +16

Fusing silicon wafers with low melting temperature glass

Leslie A. Field, R.S. Muller · Sensors and Actuators A Physical · 1990 · 42 citations

Engineering, Materials Engineering, Materials Science +12