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Modeling and characterization of AlGaInAs and related materials using selective area growth by metal-organic vapor-phase epitaxy

Materials ScienceMaterials EngineeringChemical EngineeringEngineeringCrystal Growth TechnologySurface ScienceSelective Area GrowthMetal-organic Vapor-phase EpitaxyChemical DepositionMolecular Beam EpitaxyEpitaxial GrowthMicrostructure