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InGaAlAs selective-area growth on an InP substrate by metalorganic vapor-phase epitaxy

Materials ScienceMaterials EngineeringInp SubstrateEngineeringCrystal Growth TechnologySurface ScienceApplied PhysicsIngaalas Selective-area GrowthMetalorganic Vapor-phase EpitaxyMolecular Beam EpitaxyEpitaxial GrowthOptoelectronicsChemical Vapor DepositionCompound Semiconductor