The Role of Energy in Formation of Sputtered Nanocomposite Films

Abstract

The paper analysis the effect of energy E, delivered to the growing film by bombarding ions and fast condensing atoms, on its (i) structure, (ii) elemental and phase composition and (iii) physical properties. A special attention is devoted to the macrostress s generated in sputtered films under ion bombardment. The conditions under which thick, low-stress sputtered films can be produced are given.