Gaseous etching of 6H–SiC at relatively low temperatures

Performance limiting micropipe defects in silicon carbide wafers

Philip G. Neudeck, J. A. Powell · IEEE Electron Device Letters · 1994 · 307 citations · Full text

Engineering, Electrical Engineering, Materials Science +16

Chemomechanical Polishing of Silicon Carbide

Ling Zhou, V. Audurier, Pirouz Pirouz et al. · Journal of The Electrochemical Society · 1997 · 211 citations

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Preparation of atomically flat surfaces on silicon carbide using hydrogen etching

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The Preference of Silicon Carbide for Growth in the Metastable Cubic Form

Volker Heine, Ching Cheng, R. J. Needs · Journal of the American Ceramic Society · 1991 · 146 citations

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Thin films and devices of diamond, silicon carbide and gallium nitride

R. F. Davis · Physica B Condensed Matter · 1993 · 139 citations

Natural Sciences, Materials Engineering, Materials Science +16