Preparation of atomically flat surfaces on silicon carbide using hydrogen etching - Concepedia

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Preparation of atomically flat surfaces on silicon carbide using hydrogen etching

207

Citations

8

References

1998

Year

V. Ramachandran, M.F. Brady, Arthur R. Smith, R. M. Feenstra, David W. Greve

Journal of Electronic Materials

Materials ScienceMaterials EngineeringEngineeringMicrofabricationSurface AnalysisSurface ScienceApplied PhysicsSilicon CarbideFlat SurfacesMicroelectronicsPlasma EtchingSurface ProcessingCarbide

References

	Year	Citations

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