Publication | Closed Access
Advantages of the FinFET architecture in SONOS and Nanocrystal memory devices
16
Citations
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References
2007
Year
Unknown Venue
Non-volatile MemoryElectrical EngineeringEngineeringNanoelectronicsNanotechnologyFlash MemoryApplied PhysicsComputer EngineeringComputer ArchitectureNanocrystal Memory DevicesStrong Performance AdvantagesMemory DevicesSemiconductor MemorySi Nanocrystals StorageMemory DeviceMicroelectronicsFinfet Architecture
Double-gate and tri-gate FinFET type memories with nitride (SONOS-like) or Si nanocrystals storage with minimum feature sizes of 10 nm were realized. Strong performance advantages in program / erase characteristics and reliability deeply linked to the FinFET architecture are demonstrated.
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