Nitrogen incorporation during 4H-SiC epitaxy in a chimney CVD reactor - Concepedia

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Nitrogen incorporation during 4H-SiC epitaxy in a chimney CVD reactor

41

Citations

14

References

2001

Year

J. Zhang, A. Ellison, Margareta K. Linnarsson, Erik Janzén, Anne Henry

Journal of Crystal Growth

Nuclear CeramicChimney Cvd ReactorEngineeringApplied PhysicsCarbide

References

	Year	Citations

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