Publication | Closed Access
In situ substrate preparation for high-quality SiC chemical vapour deposition
117
Citations
20
References
1997
Year
Materials ScienceMaterials EngineeringEngineeringSitu Substrate PreparationSurface ScienceApplied PhysicsSemiconductor Device FabricationChemical DepositionChemical Vapor DepositionThin Film ProcessingCarbide
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