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Natural SciencesMaterials EngineeringMaterials ScienceCeramic MaterialsElectronic MaterialsSurface ScienceChemical Vapor DepositionPhysical Vapor DepositionSemiconductor Device MaterialsSilicon MaterialsSubstrate PreparationThin-film DepositionChemical Vapor Deposition PrecursorsDeposition TechniquesSilicon CarbideSilicon Carbide (Sic) MaterialsSilicon Chemical Vapor Deposition
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6H-silicon carbide devices and applications
John W. Palmour, J. A. Edmond, Hoyoul Kong et al. · Physica B Condensed Matter · 1993 · 186 citations
Defects in plastically deformed 6H SiC single crystals studied by transmission electron microscopy
Koji Maeda, K. Suzuki, Satoshi Fujita et al. · Philosophical magazine. A/Philosophical magazine. A. Physics of condensed matter. Structure, defects and mechanical properties · 1988 · 164 citations
Natural Sciences, Materials Engineering, Materials Science +17