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Structural properties of alloyed Ti/Al/Ti/Au and Ti/Al/Mo/Au ohmic contacts to AlGaN/GaN

Materials EngineeringMaterials ScienceStructural PropertiesAluminium NitrideAlloyed Ti/al/ti/auEngineeringApplied PhysicsAluminum Gallium NitrideGan Power DeviceGallium OxideTi/al/mo/au Ohmic ContactsCategoryiii-v SemiconductorMicrostructure