Ultramicroscopy · 1992 · 60 citations · 11 references
EngineeringMaterials EngineeringMaterials ScienceMicroelectromechanical SystemsMicrofabricationSurface ScienceAtomic Force MicroscopyElectron Beam LithographyElectron MicroscopyMicrofabrication ProcessesMicromachiningSurface MicromachiningElectron Beam DeflectionFocused Ion Beam LithographyFocused Ion Beam MachiningFocused Ion Beam PatterningFocused Ion Beam Scanning Electron MicroscopyPrecision MicrofabricationTip-sample Adhesion
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G. Binnig, C. F. Quate, Ch. Gerber · Physical Review Letters · 1986 · 14.4K citations · Full text
Atomic Resolution with Atomic Force Microscope
G. Binnig, Ch. Gerber, E. Stoll et al. · Europhysics Letters (EPL) · 1987 · 548 citations