Publication | Closed Access
Microfabrication of AFM tips using focused ion and electron beam techniques
60
Citations
11
References
1992
Year
Materials ScienceEngineeringMicromachinesMicroscopyMicrofabricationElectron Beam TechniquesSurface ScienceApplied PhysicsFocused IonTarget FabricationScanning Force MicroscopyIon BeamAfm TipsMicrostructure
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