Concepedia

Evaluating substrate bias on the phase-forming behavior of tungsten thin films deposited by diode and ionized magnetron sputtering

G.S. Chen, Ling Yang, Hui Tian, Chia-Ming Hsu

Thin Solid Films · 2005 · 28 citations · 27 references

DOI

Concepts

References

27

The microstructure of sputter‐deposited coatings

John A. Thornton · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 1.3K citations

, , +16

Thin-film deposition: principles and practice

Choice Reviews Online · 1996 · 714 citations

, , +17

Metal ion deposition from ionized mangetron sputtering discharge

S. M. Rossnagel, Jeffrey Hopwood · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 307 citations

, , +17

Residual stress, microstructure, and structure of tungsten thin films deposited by magnetron sputtering

Y.G. Shen, Q. C. Zhang, David R. McKenzie et al. · Journal of Applied Physics · 2000 · 213 citations

, , +16

Phase transformation of thin sputter-deposited tungsten films at room temperature

S. M. Rossnagel, I. C. Noyan, C. Cabral · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 172 citations

, , +17