C. Cabral

Phase transformation of thin sputter-deposited tungsten films at room temperature

S. M. Rossnagel, I. C. Noyan, C. Cabral · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 169 citations

Materials Science, Semiconductors, Thin Film Physics +15

Two gates are better than one [double-gate MOSFET process]

P. M. Solomon, K.W. Guarini, Yifan Zhang et al. · IEEE Circuits and Devices Magazine · 2003 · 81 citations

Dense Circuit Layouts, Electrical Engineering, Physical Design (Electronics) +11

Thermodynamics and kinetics of room-temperature microstructural evolution in copper films

Christophe Detavernier, S. M. Rossnagel, Cevdet Noyan et al. · Journal of Applied Physics · 2003 · 76 citations

Engineering, Severe Plastic Deformation, Mechanical Engineering +17

Triple-self-aligned, planar double-gate MOSFETs: devices and circuits

K.W. Guarini, P. M. Solomon, Y. Zhang et al. · 2002 · 68 citations

Electrical Engineering, Gate Undercut, Engineering +11

Preparation of low resistivity Cu–1 at. %Cr thin films by magnetron sputtering

C. Cabral, J. M. E. Harper, K. Holloway et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1992 · 47 citations

Engineering, Integrated Circuits, Thin Film Process Technology +21