Defect and stress relaxation in HVPE-GaN films using high temperature reactively sputtered AlN buffer

T. Paskova, E. Valcheva, Jens Birch, Sukkaneste Tungasmita, Per O. Å. Persson, S. Evtimova, M. V. Abrashev, B. Ḿonemar

Journal of Crystal Growth · 2001 · 32 citations · 5 references

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