Publication | Closed Access
Phase formation at rapid thermal annealing of Al/Ti/Ni ohmic contacts on 4H-SiC
32
Citations
7
References
2001
Year
Materials EngineeringMaterials ScienceAl/ti/ni Ohmic ContactsAluminium NitrideEngineeringPhysicsNanoelectronicsApplied PhysicsAlloy DesignRapid Thermal AnnealingCarbideStructural CeramicAlloy PhasePhase FormationMicrostructure
| Year | Citations | |
|---|---|---|
Page 1
Page 1