Reduction of amorphous incubation layer by HCl addition during deposition of microcrystalline silicon by hot-wire chemical vapor deposition

References

Page 1

	Year	Citations
Material and solar cell research in microcrystalline silicon Akbar Shah, J. Meier, E. Vallat‐Sauvain, Solar Energy Materials and Solar Cells Materials ScienceEngineeringApplied PhysicsMicrocrystalline SiliconPhotovoltaic System	2003	411
Mechanisms of silicon etching in fluorine- and chlorine-containing plasmas Daniel Flamm Pure and Applied Chemistry EngineeringPhysicsSurface ScienceApplied PhysicsSilicon On Insulator	1990	114
Charged clusters in thin film growth Nong‐Moon Hwang, Doh-Yeon Kim International Materials Reviews EngineeringChemistryAbstracta Cauliflower StructureCarbon-based MaterialNanoengineering	2004	68
Growth of amorphous-layer-free microcrystalline silicon on insulating glass substrates by plasma-enhanced chemical vapor deposition Jiang-Huai Zhou, Kazuyuki Ikuta, Tetsuji Yasuda, Applied Physics Letters Materials ScienceEpitaxial GrowthAmorphous-layer-free Microcrystalline SiliconEngineeringMicrofabrication	1997	49
Status of Cat-CVD (Hot Wire CVD) research in the United States A. H. Mahan Thin Solid Films United StatesElectrical EngineeringHot Wire Cvd	2001	39
Status of Cat-CVD (Hot-Wire CVD) research in Europe R.E.I. Schropp Thin Solid Films Electric Power TransmissionAssessmentElectrical EngineeringHot-wire Cvd	2001	39
Dominant rate process of silicon surface etching by hydrogen chloride gas Hitoshi Habuka, Takahiro Suzuki, Sunao Yamamoto, Thin Solid Films Materials EngineeringChemical EngineeringEngineeringMicrofabricationHydrogen Chloride Gas	2005	34
Incubation Effects upon Polycrystalline Silicon on Glass Deposited by Hot‐Wire CVD Shui-Yang Lien, Hsin-Yuan Mao, Bing-Rui Wu, Chemical Vapor Deposition EngineeringGlass MaterialSilicon On InsulatorIncubation EffectsHot‐wire Cvd	2007	17
Studies on microstructure of silicon thin films and its effect on solar cells Swati Ray, Sumita Mukhopadhyay, Tapati Jana Solar Energy Materials and Solar Cells Materials ScienceEngineeringSilicon Thin FilmsSilicon On InsulatorApplied Physics	2005	15
Microcrystalline silicon thin films grown at high deposition rate by PECVD G. Ambrosone, U. Coscia, S. Lettieri, Thin Solid Films Materials ScienceEngineeringApplied PhysicsThin Film Process TechnologyThin Films	2006	14

Page 1