Microcrystalline silicon thin films grown at high deposition rate by PECVD - Concepedia

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Microcrystalline silicon thin films grown at high deposition rate by PECVD

14

Citations

19

References

2006

Year

G. Ambrosone, U. Coscia, S. Lettieri, P. Maddalena, M. Ambrico, G. Perna, C. Minarini

Thin Solid Films

Materials ScienceEngineeringApplied PhysicsThin Film Process TechnologyThin FilmsChemical DepositionEpitaxial GrowthHigh Deposition RateChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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