Concepedia

Author

Sunao Yamamoto

Yokohama National University

Also Known As

S. Yamamoto, Sunao Yamamoto

2

Publications

40

Citations

2

H-Index

7

Concepts

All Affiliations

Yokohama National University
SY

About

Sunao Yamamoto is an author at Yokohama National University specializing in microfabrication, engineering, and applied physics.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

1

1

34

2

Applied Physics

1

1

34

3

Chemical Engineering

1

1

34

4

Materials Engineering

1

1

34

5

Microelectronics

1

1

34

Sunao Yamamoto

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1

Publications

34

Citations

1

H-Index

YearCitations

Dominant rate process of silicon surface etching by hydrogen chloride gas

Hitoshi Habuka, Takahiro Suzuki, Sunao Yamamoto,

Thin Solid Films

2005

34

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