Concepedia

Kazuyuki Ikuta

KI

Statistics

Publications

12

Citations

365

H-Index

11

Active since

1993

Affiliations

University of Tsukuba(Current)

Kazuyuki Ikuta is an author at University of Tsukuba specializing in materials science, materials engineering, and silicon materials.

Publications per year

1993–2008

12

Publications

12

Substrate dependence of initial growth of microcrystalline silicon in plasma-enhanced chemical vapor deposition

Michio Kondo, Yasutake Toyoshima, Akihisa Matsuda et al. · Journal of Applied Physics · 1996 · 89 citations

Engineering, Materials Engineering, Materials Science +17

Growth of amorphous-layer-free microcrystalline silicon on insulating glass substrates by plasma-enhanced chemical vapor deposition

Jiang-Huai Zhou, Kazuyuki Ikuta, Tetsuji Yasuda et al. · Applied Physics Letters · 1997 · 50 citations

Natural Sciences, Materials Engineering, Materials Science +17

0.1-μm InAlAs/InGaAs HEMTs with an InP-recess-etch stopper grown by MOCVD

T. Enoki, Hiroshi Itô, Kazuyuki Ikuta et al. · 2002 · 44 citations

Engineering, Electrical Engineering, Materials Science +10

The Formation Mechanism and Step Coverage Quality of Tetraethylorthosilicate ‐ SiO2 Films Studied by the Micro/Macrocavity Method

Tetsuji Sorita, Satoru Shiga, Kazuyuki Ikuta et al. · Journal of The Electrochemical Society · 1993 · 35 citations

Natural Sciences, Materials Engineering, Materials Science +13

Control of crystallinity of microcrystalline silicon film grown on insulating glass substrates

Jiang-Huai Zhou, Kazuyuki Ikuta, Tetsuji Yasuda et al. · Journal of Non-Crystalline Solids · 1998 · 32 citations

Natural Sciences, Materials Engineering, Materials Science +14

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