Concepedia

Satoru Shiga

SS

Statistics

Publications

1

Citations

35

H-Index

1

Active since

1993

Affiliations

The University of Tokyo(Current)

Satoru Shiga is an author at The University of Tokyo specializing in applied physics, nanomaterials, and engineering.

Top concepts

Thin FilmsEngineeringNanomaterialsApplied PhysicsSurface ScienceMaterial ScienceMicrofabricationChemical EngineeringMaterials EngineeringMaterials Fabrication

Publications per year

1993–1993

1

Publications

1

The Formation Mechanism and Step Coverage Quality of Tetraethylorthosilicate ‐ SiO2 Films Studied by the Micro/Macrocavity Method

Tetsuji Sorita, Satoru Shiga, Kazuyuki Ikuta et al. · Journal of The Electrochemical Society · 1993 · 35 citations

Engineering, Thin Film Process Technology, Growth Rate Uniformity +19

1–1 of 1