SiO2 shallow nanostructures ICP etching using ZEP electroresist

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T. E. F. M. Standaert, Christer Hedlund, Eric Joseph et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2003 · 275 citations

Engineering, Silicon Carbide, Silicon On Insulator +19

“Smart” polymeric microfluidics fabricated by plasma processing: controlled wetting, capillary filling and hydrophobic valving

Katerina Tsougeni, Dimitrios Papageorgiou, A. Tserepi et al. · Lab on a Chip · 2009 · 177 citations

Handbook of Advanced Plasma Processing Techniques

J Shul, S L Pearton · Plasma Physics and Controlled Fusion · 2001 · 173 citations

Electrical Engineering, Engineering, Space Plasma Physics +15

Effect of cold development on improvement in electron-beam nanopatterning resolution and line roughness

Leonidas E. Ocola, Aaron Stein · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2006 · 116 citations

Engineering, Electron-beam Lithography, Microscopy +20

Fabrication of Si-based nanoimprint stamps with sub-20 nm features

Ivan Maximov, E.-L. Sarwe, M. Beck et al. · Microelectronic Engineering · 2002 · 54 citations

Materials Science, Si-based Nanoimprint Stamps, Engineering +10