Eric Joseph

Role of fluorocarbon film formation in the etching of silicon, silicon dioxide, silicon nitride, and amorphous hydrogenated silicon carbide

T. E. F. M. Standaert, Christer Hedlund, Eric Joseph et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2003 · 275 citations

Engineering, Silicon Carbide, Silicon On Insulator +19

Write Strategies for 2 and 4-bit Multi-Level Phase-Change Memory

T. Nirschl, C.-F. Chen, Eric Joseph et al. · 2007 · 273 citations

Hardware Security, Write Strategies, Electrical Engineering +14

Fluorocarbon assisted atomic layer etching of SiO2 using cyclic Ar/C4F8 plasma

Dominik Metzler, Robert L. Bruce, Sebastian Engelmann et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2013 · 190 citations · Full text

Engineering, Fluorocarbon Surface Coverage, Chemical Modification +17

Ultra-Thin Phase-Change Bridge Memory Device Using GeSb

Y. C. Chen, Charles Rettner, Simone Raoux et al. · 2006 · 154 citations

Materials Science, Electrical Engineering, Electronic Devices +15

Two-Dimensional Pattern Formation Using Graphoepitaxy of PS-<i>b</i>-PMMA Block Copolymers for Advanced FinFET Device and Circuit Fabrication

Hsinyu Tsai, Jed W. Pitera, Hiroyuki Miyazoe et al. · ACS Nano · 2014 · 153 citations

Engineering, Molecular Self-assembly, Pattern Transfer +17