Eric Joseph

Role of fluorocarbon film formation in the etching of silicon, silicon dioxide, silicon nitride, and amorphous hydrogenated silicon carbide

T. E. F. M. Standaert, Christer Hedlund, Eric Joseph et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2003 · 281 citations

Natural Sciences, Materials Engineering, Materials Science +17

Write Strategies for 2 and 4-bit Multi-Level Phase-Change Memory

T. Nirschl, C.-F. Chen, Eric Joseph et al. · 2007 · 274 citations

Engineering, Computer Engineering, Computer Science +7

Fluorocarbon assisted atomic layer etching of SiO2 using cyclic Ar/C4F8 plasma

Dominik Metzler, Robert L. Bruce, Sebastian Engelmann et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2013 · 195 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Ultra-Thin Phase-Change Bridge Memory Device Using GeSb

Y. C. Chen, Charles Rettner, Simone Raoux et al. · 2006 · 156 citations

Engineering, Materials Engineering, Materials Science +15

Two-Dimensional Pattern Formation Using Graphoepitaxy of PS-<i>b</i>-PMMA Block Copolymers for Advanced FinFET Device and Circuit Fabrication

Hsinyu Tsai, Jed W. Pitera, Hiroyuki Miyazoe et al. · ACS Nano · 2014 · 155 citations

Engineering, Electrical Engineering, Materials Science +15