Laser thermal processing for ultra shallow junction formation: numerical simulation and comparison with experiments - Concepedia

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Laser thermal processing for ultra shallow junction formation: numerical simulation and comparison with experiments

40

Citations

12

References

2003

Year

Miguel Hernández, J. Venturini, D. Zahorski, J. Boulmer, D. Débarre, G. Kerrien, T. Sarnet, C. Laviron, M.N. Séméria, D. Camel,

Applied Surface Science

PhotonicsAdvanced Laser ProcessingEngineeringPhysicsThermal BloomingNumerical SimulationApplied PhysicsLaser Processing TechnologyLaser-assisted DepositionHeat TransferPulsed Laser DepositionMicroelectronicsThermal EngineeringOptoelectronicsLaser Thermal Processing

References

	Year	Citations

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