G. Kerrien

Laser thermal processing for ultra shallow junction formation: numerical simulation and comparison with experiments

Miguel Hernández, J. Venturini, D. Zahorski et al. · Applied Surface Science · 2003 · 41 citations

Engineering, Electrical Engineering, Materials Science +16

Ultra-shallow, super-doped and box-like junctions realized by laser-induced doping

G. Kerrien, J. Boulmer, D. Débarre et al. · Applied Surface Science · 2002 · 30 citations

Engineering, Materials Science, Physics +14

Optical characterization of laser processed ultra-shallow junctions

G. Kerrien, Miguel Hernández, C. Laviron et al. · Applied Surface Science · 2003 · 28 citations

Engineering, Materials Engineering, Materials Science +14

Gas immersion laser doping (GILD) for ultra-shallow junction formation

G. Kerrien, T. Sarnet, D. Débarre et al. · Thin Solid Films · 2004 · 26 citations

Engineering, Materials Engineering, Materials Science +14

Excimer laser thermal processing of ultra-shallow junction: laser pulse duration

J. Venturini, Miguel Hernández, G. Kerrien et al. · Thin Solid Films · 2004 · 20 citations

Engineering, Electrical Engineering, Materials Science +16