Concepedia

Publication | Closed Access

Optical characterization of laser processed ultra-shallow junctions

DOI

28

Citations

6

References

2003

Year

G. Kerrien, Miguel Hernández, C. Laviron, T. Sarnet, D. Débarre, Takashi Noguchi, D. Zahorski, J. Venturini, M.N. Séméria, J. Boulmer
Applied Surface Science

References

YearCitations

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