Excimer laser thermal processing of ultra-shallow junction: laser pulse duration - Concepedia

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Excimer laser thermal processing of ultra-shallow junction: laser pulse duration

20

Citations

6

References

2004

Year

J. Venturini, Miguel Hernández, G. Kerrien, C. Laviron, D. Camel, Jean‐Louis Santailler, T. Sarnet, J. Boulmer

Thin Solid Films

PhotonicsAdvanced Laser ProcessingEngineeringPhysicsUltra-shallow JunctionApplied PhysicsLaser Processing TechnologyLaser-assisted DepositionHeat TransferThermal EngineeringExcimer Lasers

References

	Year	Citations

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