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Ultra-shallow junction formation by excimer laser annealing and low energy (<1 keV) B implantation: A two-dimensional analysis

DOI

39

Citations

13

References

2002

Year

G. Fortunato, L. Mariucci, M. Stanizzi, V. Privitera, S. Whelan, C. Spinella, Giovanni Mannino, M. Italia, Corrado Bongiorno, A. Mittiga
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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