Microelectronics Reliability · 1998 · 81 citations · 17 references
EngineeringComputer EngineeringElectrical EngineeringMicroelectronicsSemiconductor DevicesSemiconductor MaterialsDevice CharacterizationDevice ModelingMetal-oxide-semiconductor Field-effect TransistorsNanoelectronicsSemiconductor PhysicsSemiconductor ReliabilityDopant DiffusionDopant DistributionMosfet ModelingRandom Dopant FluctuationSemiconductor Doping Profiles
17
CMOS scaling into the nanometer regime
Yuan Taur, D. A. Buchanan, Wei Chen et al. · Proceedings of the IEEE · 1997 · 889 citations
Engineering, Computer Engineering, Electrical Engineering +17