Publication | Closed Access
Selective MOVPE of GaN and Al Ga1−N with smooth vertical facets
36
Citations
7
References
1998
Year
Materials EngineeringAluminium NitrideWide-bandgap SemiconductorEngineeringPhysicsAl Ga1−nSmooth Vertical FacetsApplied PhysicsAluminum Gallium NitrideGan Power DeviceSelective MovpeCategoryiii-v SemiconductorOptoelectronics
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