Fabrication process of high aspect ratio elastic structures for piezoelectric motor applications

Abstract

Briefly reports on advances in the fabrication technology of components for millimeter size ultrasonic piezoelectric motors. A very large height to width aspect ratio with good lateral patterning resolution is required for the active component in acoustic mode conversion. A new fabrication process using a thick epoxy-based material (SU-8) and the electroplating of nickel is demonstrated. The main advantages over past fabrication methods are better flexibility in the design, simplicity of the fabrication process and the combination of metallic materials (Ni) with polymeric materials (SU-8). The mechanical properties of SU-8 have been measured using free cantilever beam structures.