Hybrid ultrasonic micromachined motors

Abstract

A hybrid ultrasonic motor has been fabricated using silicon micromachining and metallic micromechanical components. The concept of elastic force motors (EFMs) is applied for the conversion of standing waves to mechanical energy. Millimeter-size prototypes (6*6*2 mm) show interesting characteristics. Free rotation speed up to 600 rpm and net torque of 50 nNm are observed. Typical applications are the motorization of electronic watches or the positioning systems in instrumentation.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>