Concepedia

Misao Sekimoto

MS

Statistics

Publications

4

Citations

226

H-Index

4

Active since

1981

Affiliations

NTT (Japan)(Current)

Misao Sekimoto is an author at NTT (Japan) specializing in engineering, synchrotron radiation, and applied physics.

Top concepts

EngineeringApplied PhysicsSurface ScienceMaterial ScienceSynchrotron RadiationThin FilmsOptoelectronicsMicrofabricationIntegrated CircuitsHealth

Publications per year

1981–1996

4

Publications

4

Silicon nitride single-layer x-ray mask

Misao Sekimoto, Hideo Yoshihara, Takashi Ohkubo · Journal of Vacuum Science and Technology · 1982 · 185 citations

Materials Science, Lp-cvd Process, Engineering +15

Silicon Nitride Single-Layer X-Ray Mask

Misao Sekimoto, Hideo Yoshihara, Takashi Ohkubo et al. · Japanese Journal of Applied Physics · 1981 · 16 citations

Materials Science, Optical Materials, Engineering +13

Defect-free x-ray masks for 0.2-μm large-scale integrated circuits

Ikuo Okada, Y. Saitoh, Misao Sekimoto et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 13 citations

Engineering, Vlsi Design, X-ray Masks +17

Soft x-ray microscope at the undulator beamline of the Photon Factory

Yasushi Kagoshima, S. Aoki, Masami Kakuchi et al. · Review of Scientific Instruments · 1989 · 12 citations

X-ray Spectroscopy, Engineering, Microscopy +22

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