Statistics
Publications
4
Citations
227
H-Index
4
Active since
1981
Affiliations
NTT (Japan)(Current)
Misao Sekimoto is an author at NTT (Japan) specializing in mask fabrication, materials engineering, and x-ray optics.
Publications per year
1981–1996
4
4
Silicon Nitride Single-Layer X-Ray Mask
Misao Sekimoto, Hideo Yoshihara, Takashi Ohkubo et al. · Japanese Journal of Applied Physics · 1981 · 16 citations
Natural Sciences, Materials Engineering, Materials Science +17
1–4 of 4