Concepedia

Masami Kakuchi

MK

9

Publications

265

Citations

9

H-Index

1977

Active since

Affiliations

NTT (Japan)(Current)

High Energy Accelerator Research Organization

Masami Kakuchi is an author at NTT (Japan) specializing in engineering, materials science, and applied physics.

Top concepts

EngineeringMaterial ScienceApplied PhysicsMicroscopyX-ray ImagingPolymer ScienceMicroelectronicsMicrofabricationPolymer ChemistryX-ray Spectroscopy

Publications per year

1977–1990

9

Publications

9

Amorphous carbon films as resist masks with high reactive ion etching resistance for nanometer lithography

Masami Kakuchi, Makoto Hikita, Toshiaki Tamamura · Applied Physics Letters · 1986 · 54 citations

Practical Nanometer Lithography, Engineering, Electron-beam Lithography +19

Poly (Fluoro Methacrylate) as Highly Sensitive, High Contrast Positive Resist

Masami Kakuchi, Shungo Sugawara, Kei Murase et al. · Journal of The Electrochemical Society · 1977 · 47 citations

Materials Science, Conducting Polymer, Engineering +8

Polypyrrole-based conducting polymer alloy films: physical properties and film morphology

Osamu Niwa, Masami Kakuchi, Toshiaki Tamamura · Macromolecules · 1987 · 46 citations

Engineering, Chemistry, Physical Properties +21

Mechanical Properties of Flexible Polypyrrole-Based Conducting Polymer Alloy Films

Osamu Niwa, Masami Kakuchi, Toshiaki Tamamura · Polymer Journal · 1987 · 37 citations · Full text

Materials Science, Conducting Polymer, Engineering +5

Ta/SiN-Structure X-Ray Masks for Sub-Half-Micron LSIs

Shigehisa Ohki, Masami Kakuchi, Tadahito Matsuda et al. · Japanese Journal of Applied Physics · 1989 · 22 citations

Engineering, Electron-beam Lithography, Microscopy +17

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