Concepedia

R. Luthier

RL

9

Publications

427

Citations

9

H-Index

1990

Active since

Affiliations

École Polytechnique Fédérale de Lausanne(Current)

University of Neuchâtel

R. Luthier is an author at École Polytechnique Fédérale de Lausanne specializing in engineering, microfabrication, and mechanical engineering.

Top concepts

EngineeringMaterial ScienceMicrofabricationMechanical EngineeringApplied PhysicsThin FilmsMechatronicsMechanical DesignMagnetic Thin FilmsElectrical Engineering

Publications per year

1990–2002

9

Publications

9

Fabrication and characterization of PZT thin-film vibrators for micromotors

Paul Muralt, Markus Köhli, Thomas Maeder et al. · Sensors and Actuators A Physical · 1995 · 185 citations · Full text

Engineering, Micromachines, Microfabrication +5

Microfabrication of 3D multidirectional inclined structures by UV lithography and electroplating

C. Beuret, G.-A. Racine, J. Gobet et al. · 2002 · 73 citations · Full text

Materials Science, Engineering, Microfabrication +15

Hybrid ultrasonic micromachined motors

G.-A. Racine, R. Luthier, Ν. F. de Rooij · 2002 · 46 citations · Full text

Engineering, Elastic Force Motors, Mechanical Engineering +19

Low-cost technology for multilayer electroplated parts using laminated dry film resist

H. Lorenz, L. Paratte, R. Luthier et al. · Sensors and Actuators A Physical · 1996 · 45 citations · Full text

Materials Science, Electrical Engineering, Engineering +10

Fabrication and characterization of PZT thin films for micromotors

Paul Muralt, Markus Köhli, Thomas Maeder et al. · Integrated ferroelectrics · 1995 · 30 citations · Full text

Engineering, Mechanical Engineering, Abstract Piezoelectric Membranes +16

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