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Publication | Open Access

Fabrication and characterization of PZT thin-film vibrators for micromotors

DOIFull Paper Access

185

Citations

14

References

1995

Year

Paul Muralt, Markus Köhli, Thomas Maeder, Andréi L. Kholkin, Keith G. Brooks, N. Setter, R. Luthier
Sensors and Actuators A Physical

References

YearCitations

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