Micromechanical testing of MEMS materials

Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)

E. W. Becker, W. Ehrfeld, Patric Hagmann et al. · Microelectronic Engineering · 1986 · 958 citations

Engineering, Materials Engineering, Materials Science +16

Experimental probability estimators for Weibull plots

John D. Sullivan, P. H. Lauzon · Journal of Materials Science Letters · 1986 · 221 citations

Natural Sciences, Mathematics, Experimental Design +8

The LIGA technique and its potential for microsystems-a survey

W. Bacher, Wolfgang Menz, J. Mohr · IEEE Transactions on Industrial Electronics · 1995 · 114 citations

Engineering, Manufacturing Engineering, Materials Science +17

Microstructural and mechanical properties investigation of electrodeposited and annealed LIGA nickel structures

Thomas Edward Buchheit, Joseph R. Michael, Todd R. Christenson et al. · Metallurgical and Materials Transactions A · 2002 · 111 citations

Natural Sciences, Materials Engineering, Materials Science +12

Young's Modulus, Yield Strength and Fracture Strength of Microelements Determined by Tensile Testing

S. Greek, Fredric Ericson · MRS Proceedings · 1998 · 37 citations

Natural Sciences, Materials Engineering, Materials Science +14