Microstructural and mechanical properties investigation of electrodeposited and annealed LIGA nickel structures

Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)

E. W. Becker, W. Ehrfeld, Patric Hagmann et al. · Microelectronic Engineering · 1986 · 958 citations

Engineering, Materials Engineering, Materials Science +16

A comparative study of Pd/Sn/Au, Au/Ge/Au/Ni/Au, Au-Ge/Ni and Ni/Au-Ge/Ni ohmic contacts to n-GaAs

Md. Shafiqul Islam, P.J. McNally · Microelectronic Engineering · 1998 · 606 citations

Engineering, Electrical Engineering, Materials Science +14

Measurements of Young's modulus, Poisson's ratio, and tensile strength of polysilicon

W. N. Sharpe, Bin Yuan, Ranji Vaidyanathan et al. · 1997 · 270 citations

Engineering, Materials Engineering, Materials Science +17

Inhibition and nickel electrocrystallization

J. Amblard, Israël Epelboin, M. Froment et al. · Journal of Applied Electrochemistry · 1979 · 253 citations

Natural Sciences, Chemical Engineering, Chemistry +12

The LIGA technique and its potential for microsystems-a survey

W. Bacher, Wolfgang Menz, J. Mohr · IEEE Transactions on Industrial Electronics · 1995 · 114 citations

Engineering, Manufacturing Engineering, Materials Science +17