S. Greek

Mechanical characterization of thick polysilicon films: Young's modulus and fracture strength evaluated with microstructures

S. Greek, Fredric Ericson, Stefan Johansson et al. · Journal of Micromechanics and Microengineering · 1999 · 125 citations

Engineering, Micromechanics, Mechanical Engineering +21

In situ tensile strength measurement and Weibull analysis of thick film and thin film micromachined polysilicon structures

S. Greek, Fredric Ericson, Stefan Johansson et al. · Thin Solid Films · 1997 · 119 citations

Materials Science, Engineering, Mechanical Behavior +11

High-sensitivity surface micromachined structures for internal stress and stress gradient evaluation

Fredric Ericson, S. Greek, Jan Söderkvist et al. · Journal of Micromechanics and Microengineering · 1997 · 77 citations

Engineering, Micromechanics, Mechanical Engineering +17

Deflection of surface-micromachined devices due to internal, homogeneous or gradient stresses

S. Greek, N. Chiţică · Sensors and Actuators A Physical · 1999 · 46 citations

Gradient Stresses, Engineering, Soft Robotics +12

Tensile testing of thin-film microstructures

S. Greek, Stefan Johansson · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1997 · 39 citations

Engineering, Micromechanics, Mechanical Engineering +20